Latar belakang: Infeksi nosokomial dapat terjadi karena kontak antara perawat dan pasien. Perawat memegang peran penting dalam penyebaran infeksi nosokomial di rumah sakit. Cara menghindari infeksi tersebut dengan mencuci tangan. Cuci tangan adalah cara pencegahan dan pengendalian infeksi untuk mencapai sistem pelayanan kesehatan yang aman dan efektif sehingga kepatuhan perawat dalam mencuci tangan memengaruhi penyebaran infeksi nosokomial di rumah sakit. Tujuan: Kajian literatur ini bertujuan untuk mengetahui faktor-faktor yang memengaruhi kepatuhan perawat melakukan hand hygiene. Metode: Kajian literatur ini menggunakan metode Thematic Analysis: a simplified approach. Artikel yang digunakan diambil dari database PubMed, EBSCO, dan Google Scholar, kemudian dikritisi menggunakan JBI Checklist for Analytical Cross Sectional Studies. Hasil: Faktorfaktor yang memengaruhi kepatuhan perawat melakukan hand hygiene, yaitu faktor internal: motivasi, pengetahuan, masa kerja, pendidikan, sikap, beban kerja, dan usia; dan faktor eksternal: fasilitas/ketersediaan sarana, pengingat, supervisi/pengawasan, ketersediaan tenaga kerja, prosedur tetap, penghargaan, sanksi, dan pelatihan. Kesimpulan: Berdasarkan hasil kajian literatur, faktor internal dengan kategori kuat yaitu motivasi, pengetahuan, dan sikap; dan faktor eksternal dengan kategori kuat yaitu fasilitas/ketersediaan sarana dan masa kerja. Saran: Penulis berharap agar kedepannya lebih banyak penelitian mengenai faktorfaktor yang memengaruhi kepatuhan perawat melakukan hand hygiene, khususnya mengenai faktor beban kerja, pengingat, fasilitas, penghargaan, sanksi, dan pelatihan = Background: Nosocomial infection may occur when there’s contact between nurses and the patient. Nurse plays an important role in the spread of nosocomial infection in the hospital. The way to avoid this infection by washing hand. Handwashing is a fundamental means of infection prevention and control to achieve a safe and effective health care system so that nurse’s compliance in hand washing affects the spread of nosocomial infection in hospitals. Objective: The purpose of this study literature is to determine the factors that affect the compliance of nurses in doing hand washing activities in hospitals. Method: This literature review use Thematic Analysis method: a simplified approach. The articles used in this study were taken from PubMed, EBSCO and Google Scholar, then critiqued using the JBI Checklist for Analytical Cross Sectional Studies. Result: Factors affecting nurse’s compliance in hand hygiene are internal factors: motivation, knowledge, legth of work, education, attitude, workload, and age; and external factors: facilities / availability of tools for hand hygiene, reminder, supervision of hand hygiene, availability of labor, permanent procedure, appreciation, punishment, and training. Conclusion: Based on this literature, internal factors with strong categories are motivation, knowledge, and attitude; and external factors with strong categories are facilities / availability of tools for hand hygiene and legth of work. Suggestion: The authors hope that in the future there are more research about factors that affect compliance of nurses in doing hand hygiene esspecially about workload factors, reminder, appreciation, punishment, and training factors.